Chemical Vapor Deposition Coating Furnace with TiCL4,AICL3
precursors and process gases
CVD Coating Machine is a state-of-the-art vacuum coating technique,
which utilizes chemical deposition equipment to deposit a thin
layer of material onto the surface of a substrate. This type of
surface coating apparatus offers a wide range of coating speeds,
from 0.1 to 2.0m/min. It also provides a precise and uniform
coating pressure, with a pressure stability of -±2mbar. The heating
system is electric heating, which ensures a stable substrate
temperature for optimal coating results. The whole process is
controlled by a PLC system, which ensures precise coating thickness
and uniformity. This CVD Coating Machine is ideal for a variety of
CVD coating applications.
The differences between ALD and CVD processes:
ALD is a chemical vapour deposition technique that is based on a
self-limiting surface reaction
Deposit films one atomic layer at a time
Require lower temperatures
Useful in the production of semiconductors and integrated circuits,
thin film solar cells,and in the production of high performance
coatings for optical components.
CVD is a widely used material processing technology in which thin
films are formed on a heated substrate via a chemical reaction of
gas-phase precursors.
Deposit films with a wider range of thickness
Require higher temperatures
Used in fields like optics,microelectronics, and material science,
where it helps in the fabrication of thin films and coatings for
electronic devices, deposition of coatings on lenses and mirrors,
and the synthesis of various materials.
| Equipmentmodel | CVD430-1250 | CVD430-1600 | CVD530-1250 | CVD530-1600 | CVD630-1250 | CVD630-1600 |
| Effective space(mm) | Φ400X1250 | Φ400X1600 | Φ500X1250 | Φ500X1600 | Φ600X1200 | Φ600X1600 |
| Heating power(KW) | 39 | 48 | 45 | 55 | 65 | 80 |
| Quantity of heating zone | 4 | 5 | 4 | 5 | 4 | 5 |
| Equipment footprint(mm) | 6000*5800*4800 | 6000*5800*5100 | 6500*6000*4800 | 6500*6000*5100 | 7200*6200*4800 | 7200*6200*5100 |
| Process temperature(℃) | 700-1050 |
| Precursors and process gases | TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S |
| Types of coating | TiC,TiN,TiCN,a-AL2O3,K-AI2O3 |
| Optional equipments | 1. Off gas neutralizer (incl.evacuating device); 2. Second stage gas distributor (incl.,pipeline); 3. Gas station (incl.pipeline) |
• Design standards
The equipment is designed in accordance with the pressure vessel
requirements of the Quality and Technical Supervision Bureau, and
is qualified after pressure testing and shipped. The electrical
design and construction meet national standards.
• Installation pre-test and pre-acceptance
The equipment is fully assembled in our factory, including all
pipelines, vacuum pipelines, process gas pipelines, cooling water
pipelines, compressed air pipelines, etc. Pre-testing can be
carried out after installation. At the customer site, pipelines
other than the equipment are provided by the customer. The
installation also includes the connection of all cables. At the
customer site, the main cable connecting the power cabinet is
provided by the customer. After installation, we conduct vacuum and
positive pressure leakage tests on the entire equipment, as well as
mechanical and electrical function tests.
• Disassembly and transportation
The equipment will be disassembled in several large parts, packed
in a standardized manner, and loaded into the transport vehicle.
• Customer site installation and commissioning
The Redel after-sales engineer will lead the team to complete
commissioning, product trial burning and other work within 20
working days. The customer needs to make appropriate preparations
and provide the necessary tools, such as hoisting and lifting
equipment. And provide installation personnel support (it is
recommended to have 1 mechanical personnel and 1 electrical
personnel).
• Final acceptance
After installation and commissioning, the equipment can be finally
accepted in accordance with the requirements of the technical
contract.
• Training
Our after-sales engineers will provide a systematic and complete
on-site training, including operation, maintenance,
troubleshooting, etc.
• Technical data delivery
To ensure safe operation and equipment maintenance, the following
technical data will be provided to customers:
1. Equipment installation layout
2. User manual
3. Spare parts list
4. Electrical drawings
5. Component manual
FAQ
Are you a factory or trading company?
Q: Are you a factory or trading company?
A:We are China leading high-temperature vacuum furnace manufacturer
with over 10 years’ experience.
Do you have customization or OEM service?
Q: Do you have customization or OEM service??
A:Yes,we have powerful R&D team and high-tech equipment.So we
can not only supply the regular model,but also the customizable
furnace as the repuirment of our clients.
What's your advantage?
Q:What's your advantage?
A:
l Quick response to your enquiry
l High quality control
l Stable supply chain
l Timely delivery
l Excellent after-sales service
