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Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases

Zhuzhou Ruideer Metallurgy Equipment Manufacturing Co.,Ltd
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    Buy cheap Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases from wholesalers
     
    Buy cheap Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases from wholesalers
    • Buy cheap Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases from wholesalers
    • Buy cheap Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases from wholesalers
    • Buy cheap Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases from wholesalers
    • Buy cheap Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases from wholesalers

    Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases

    Ask Lasest Price
    Brand Name : Ruideer
    Model Number : 630,530,430
    Certification : CE
    Price : Negotiable
    Payment Terms : L/C, T/T
    Supply Ability : 5-6 months/set
    Delivery Time : 5-6 months
    • Product Details
    • Company Profile

    Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases

    Chemical Vapor Deposition Coating Furnace with TiCL4,AICL3 precursors and process gases


    CVD Coating Machine is a state-of-the-art vacuum coating technique, which utilizes chemical deposition equipment to deposit a thin layer of material onto the surface of a substrate. This type of surface coating apparatus offers a wide range of coating speeds, from 0.1 to 2.0m/min. It also provides a precise and uniform coating pressure, with a pressure stability of -±2mbar. The heating system is electric heating, which ensures a stable substrate temperature for optimal coating results. The whole process is controlled by a PLC system, which ensures precise coating thickness and uniformity. This CVD Coating Machine is ideal for a variety of CVD coating applications.


    The differences between ALD and CVD processes:


    ALD is a chemical vapour deposition technique that is based on a self-limiting surface reaction

    Deposit films one atomic layer at a time

    Require lower temperatures

    Useful in the production of semiconductors and integrated circuits, thin film solar cells,and in the production of high performance coatings for optical components.


    CVD is a widely used material processing technology in which thin films are formed on a heated substrate via a chemical reaction of gas-phase precursors.

    Deposit films with a wider range of thickness

    Require higher temperatures

    Used in fields like optics,microelectronics, and material science, where it helps in the fabrication of thin films and coatings for electronic devices, deposition of coatings on lenses and mirrors, and the synthesis of various materials.


    EquipmentmodelCVD430-1250CVD430-1600CVD530-1250CVD530-1600CVD630-1250CVD630-1600
    Effective space(mm)Φ400X1250Φ400X1600Φ500X1250Φ500X1600Φ600X1200Φ600X1600
    Heating power(KW)394845556580
    Quantity of heating zone454545
    Equipment footprint(mm)6000*5800*48006000*5800*51006500*6000*48006500*6000*51007200*6200*48007200*6200*5100
    Process temperature(℃)700-1050
    Precursors and process gasesTiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
    Types of coatingTiC,TiN,TiCN,a-AL2O3,K-AI2O3
    Optional equipments

    1. Off gas neutralizer (incl.evacuating device);

    2. Second stage gas distributor (incl.,pipeline);

    3. Gas station (incl.pipeline)


    • Design standards


    The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.


    • Installation pre-test and pre-acceptance


    The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.


    • Disassembly and transportation


    The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.


    • Customer site installation and commissioning


    The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).


    • Final acceptance

    After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.


    • Training

    Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.


    • Technical data delivery


    To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:


    1. Equipment installation layout

    2. User manual

    3. Spare parts list

    4. Electrical drawings

    5.  Component manual


    FAQ

    Are you a factory or trading company?

    Q: Are you a factory or trading company?

    A:We are China leading high-temperature vacuum furnace manufacturer with over 10 years’ experience.

    Do you have customization or OEM service?

    Q: Do you have customization or OEM service??

    A:Yes,we have powerful R&D team and high-tech equipment.So we can not only supply the regular model,but also the customizable furnace as the repuirment of our clients.

    What's your advantage?

    Q:What's your advantage?

    A:

    l Quick response to your enquiry

    l High quality control

    l Stable supply chain

    l Timely delivery

    l Excellent after-sales service


    Quality Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases for sale
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