HTCVD Silicon Carbide(CVD SIC)epitaxy growth furnace
This equipment is used for silicon carbide coating of
carbon-based/ceramic-based materia,especially deposition of silicon
carbide on the surface of the semiconductor epitaxial susceptor and
etching ring.
The coating rate is a very important indicator for downstream
customers, which is directly related to the production capacity of
the equipment. Our equipment can achieve a deposition rate of 50
microns per hour, and can also be equipped with rapid cooling,
which greatly reduces production time.
Technical Features
1. Using multiple temperature control zones, great temperature
uniformity;
2. Special designed deposition chamber with good sealing effect and
great anti-contamination performance;
3. Using multiple deposition channels with uniformity gas flow,
without deposition dead corner and perfect deposition surface;
4. It has treatment for the tar, solid dust and organic gases
during the deposition process
• Design standards
The equipment is designed in accordance with the pressure vessel
requirements of the Quality and Technical Supervision Bureau, and
is qualified after pressure testing and shipped. The electrical
design and construction meet national standards.
• Installation pre-test and pre-acceptance
The equipment is fully assembled in our factory, including all
pipelines, vacuum pipelines, process gas pipelines, cooling water
pipelines, compressed air pipelines, etc. Pre-testing can be
carried out after installation. At the customer site, pipelines
other than the equipment are provided by the customer. The
installation also includes the connection of all cables. At the
customer site, the main cable connecting the power cabinet is
provided by the customer. After installation, we conduct vacuum and
positive pressure leakage tests on the entire equipment, as well as
mechanical and electrical function tests.
• Disassembly and transportation
The equipment will be disassembled in several large parts, packed
in a standardized manner, and loaded into the transport vehicle.
• Customer site installation and commissioning
The Redel after-sales engineer will lead the team to complete
commissioning, product trial burning and other work within 20
working days. The customer needs to make appropriate preparations
and provide the necessary tools, such as hoisting and lifting
equipment. And provide installation personnel support (it is
recommended to have 1 mechanical personnel and 1 electrical
personnel).
• Final acceptance
After installation and commissioning, the equipment can be finally
accepted in accordance with the requirements of the technical
contract.
• Training
Our after-sales engineers will provide a systematic and complete
on-site training, including operation, maintenance,
troubleshooting, etc.
• Technical data delivery
To ensure safe operation and equipment maintenance, the following
technical data will be provided to customers:
1. Equipment installation layout
2. User manual
3. Spare parts list
4. Electrical drawings
5. Component manual
FAQ
Are you a factory or trading company?
Q: Are you a factory or trading company?
A:We are China leading high-temperature vacuum furnace manufacturer
with over 10 years’ experience.
Do you have customization or OEM service?
Q: Do you have customization or OEM service??
A:Yes,we have powerful R&D team and high-tech equipment.So we
can not only supply the regular model,but also the customizable
furnace as the repuirment of our clients.
What's your advantage?
Q:What's your advantage?
A:
l Quick response to your enquiry
l High quality control
l Stable supply chain
l Timely delivery
l Excellent after-sales service
